Achieving spatiotemporal control of light at high speeds presents immense possibilities for various applications in communication, computation, metrology, and sensing. The integration of subwavelength metasurfaces and optical waveguides offers a promising approach to manipulate light across multiple degrees of freedom at high speed in compact photonic integrated circuit (PIC) devices. Here, we demonstrate a gigahertz-rate-switchable wavefront shaping by integrating metasurface, lithium niobate on insulator photonic waveguides, and electrodes within a PIC device. As proofs of concept, we showcase the generation of a focus beam with reconfigurable arbitrary polarizations, switchable focusing with lateral focal positions and focal length, orbital angular momentum light beams as well as Bessel beams. Our measurements indicate modulation speeds of up to the gigahertz rate. This integrated platform offers a versatile and efficient means of controlling the light field at high speed within a compact system, paving the way for potential applications in optical communication, computation, sensing, and imaging.

Employing couplers to convert guided waves into free-space modes and flexibly control their wavefront is one of the key technologies in chip-integrated displays and communications. Traditional couplers are mainly composed of gratings, which have limitations in footprint, bandwidth, as well as controllability. Though the resonant/geometric metasurface newly emerges as a promising interface for bridging guided waves with free-space ones, it either relies on complex optimizations of multiple parameters, or is subject to the locked phase response of opposite spins, both of which hinder the functional diversity and practical multiplexing capability. Here, we propose and experimentally demonstrate an alternative with a spin-decoupled meta-coupler, simultaneously integrating triple functions of guided wave radiation, polarization demultiplexing, and dual-channel wavefront manipulation into a single device. By endowing polarization-dependent functionalities into a pure geometric metasurface, the out-coupled left-handed and right-handed circular polarization guided waves intelligently identify the predesigned phase modulation and reconstruct desired wavefronts, like bifocal focusing and holography multiplexing, with a polarization extinction ratio over 13.4 dB in experiments. We envision that the robust, broadband, and multifunctional meta-coupler could pave a way for the development of versatile multiplexed waveguide-based devices.

High-Q metasurfaces have important applications in high-sensitivity sensing, low-threshold lasers, and nonlinear optics due to the strong local electromagnetic field enhancements. Although ultra-high-Q resonances of bound states in the continuum (BIC) metasurfaces have been rapidly developed in the optical regime, it is still a challenging task in the terahertz band for long years because of absorption loss of dielectric materials, design, and fabrication of nanostructures, and the need for high-signal-to-noise ratio and high-resolution spectral measurements. Here, a polarization-insensitive quasi-BIC resonance with a high-Q factor of 1049 in a terahertz all-silicon metasurface is experimentally achieved, exceeding the current highest record by 3 times of magnitude. And by using this ultra-high-Q metasurface, a terahertz intensity modulation with very low optical pump power is demonstrated. The proposed all-silicon metasurface can pave the way for the research and development of high-Q terahertz metasurfaces.

Integrated optical phased arrays (OPAs) have attracted significant interest to steer laser beams for applications including free-space communications, holography, and light detection and ranging. Although many methods have been proposed to suppress grating lobes, OPAs have also been limited by the trade-off between field of view (FOV) and beamforming efficiency. Here, we propose a metasurface empowered port-selected OPA (POPA), an OPA steered by port selection, which is implemented by an aperiodic waveguide array with an average pitch less than the wavelength and phase controlled by coupling among waveguides. A metasurface layer above the POPA was designed to increase wide FOV steering, aliasing-free by polarization division. As a result, we experimentally demonstrate beam scanning over a ±41.04°×7.06° FOV. The aliasing-free POPA with expanded FOV shows successful incorporation of the waveguide-based OPA technique with an emerging metasurface design, indicating much exploration in concepts for integrated photonic devices.

The design of large-scale, high-numerical-aperture, and broadband achromatism is a big challenge in metalens research. In fact, many colorful imaging systems have RGB color filters, which means the achromatism only for RGB lights would be sufficient. Avoiding broadband achromatism is expected to greatly improve the working efficiency of metalenses. Nevertheless, a proper bandpass filter is necessary under a white light illumination in the metalens integrated imaging system. Here we propose a bandpass-filter-integrated multiwavelength achromatic metalens (NA=0.2), which is designed using a searching optimization algorithm to achieve the achromatism of RGB lights with high efficiencies. The bandpass filter is implemented by composite DBRs and defect layers, by which three desired wavelengths are selected out. The simulations and experiments on the filter-integrated metalens definitely show a good RGB achromatism. Further imaging experiments demonstrate a higher signal-to-noise ratio and resolution compared with the one without the filter. Our approach provides not only an RGB achromatic meta-imaging device but also a new route to access a highly efficient spectrum tailoring metasystem by incorporating bandpass filter designs.

We theoretically propose a hybrid lithium niobate (LN) thin-film waveguide that consists of an amorphous silicon stripe and etch-free z-cut LN for highly efficient wavelength conversion, circumventing the challenging etching on LN material. Profiting from the spatial symmetry breaking of the waveguide, the asymmetric hybrid modes can spontaneously achieve phase matching with small modal area and large spatial mode overlap, enabling enhanced second harmonic generation with a normalized conversion efficiency over 3900%W-1·cm-2 (0.5-mm-long propagation distance). The choice of integrating silicon with LN alleviates the fabrication challenge, making the platform potentially compatible with silicon photonics.

Nonlinear optical processes in waveguides play important roles in compact integrated photonics, while efficient coupling and manipulations inside the waveguides still remain challenging. In this work, we propose a new scheme for second-harmonic generation as well as beam shaping in lithium niobate slab waveguides with the assistance of well-designed grating metasurfaces at λ=1064nm. By encoding the amplitude and phase into the holographic gratings, we further demonstrate strong functionalities of nonlinear beam shaping by the metasurface design, including dual focusing and Airy beam generation. Our approach would inspire new designs in the miniaturization and integration of compact multifunctional nonlinear light sources on chip.